Articles
  • Thermodynamic analysis on the chemical vapor deposition process of Ta-C-H-Cl system
  • Hyun-Mi Kima,b, Kwang Bo Shimb , Jung-Min Leec , Hyung-Ik Leec and Kyoon Choia,*
  • a Engineering Ceramic Center, Korea Institute of Ceramic Engineering Technology, Icheon 17303, Korea b Division of Advanced Materials Science and Engineering, Hanyang Univ., Seoul 04763, Korea c The 4th R&D Institute, Agency for Defense Development, Daejon 34186, Korea
Abstract
Carbon/carbon composites (C/C) have been widely studied in the aerospace field because of their excellent thermal shock resistance and specific strength at high temperature. However, they have the problems that is easily oxidized and deteriorated under atmospheric environment. In order to overcome these shortcomings, the CVD coating of ultra-high-temperature ceramics to C/C has become an important technical issue. In this study, thermodynamic calculations were performed to TaC CVD coating on C/C by FactSage 6.2 program. The Ta-C phase diagrams were constructed with the results of thermodynamic calculations in the Ta-C-H-Cl system. Based on the Ta-C phase diagram, the experimental conditions were designed to confirm the deposition of various phases such as TaC single phase, TaC + C and TaC + Ta2C by varying the composition of Ta/C ratio. The deposited films were found to be in good agreement with the predicted phases.

Keywords: Ultra high temperature ceramics, Chemical vapor deposition, Tantalum carbide, Phase diagram.

This Article

  • 2018; 19(6): 519-524

    Published on Dec 31, 2018