Articles
  • Investigation of microstructural and electrical properties of self-aligned Ni-InGaAs alloy contacts to InGaAs as a function of rapid thermal annealing temperature

  • Shim-Hoon Yuka, Hyun-Gwon Parka, V. Janardhanama, Kyu-Hwan Shima, Sung-Nam Leeb and Chel Jong Choia,*

  • aSchool of Semiconductor and Chemical Engineering, Semiconductor Physics Research Center (SPRC) Chonbuk National University, Jeonju 561-756, Republic of Korea
    bDepartment of Nano-Optical Engineering, Korea Polytechnic University, Siheung 429-793, Republic of Korea

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This Article

  • 2020; 21(S1): 53-57

    Published on May 31, 2020

  • 10.36410/jcpr.2020.21.S1.s53
  • Received on Dec 17, 2019
  • Revised on Mar 24, 2020
  • Accepted on Apr 2, 2020

Correspondence to

  • Chel Jong Choi

  • School of Semiconductor and Chemical Engineering, Semiconductor Physics Research Center (SPRC) Chonbuk National University, Jeonju 561-756, Republic of Korea
    Tel : +82-63-270-3365
    Fax: +82-63-270-3585

  • E-mail: cjchoi@jbnu.ac.kr