Articles
  • Thermal oxidation temperature effect on the phases and photocatalytic properties of silver-doped TiO2 thin film prepared by co-sputtering

  • Hui-Ru Xua, Ping-Yuan Leeb, Ya-Wei Tsaia and Ying-Chieh Leea,*

  • aDepartment of Materials Engineering, National Pingtung University of Science & Technology, Pingtung 91201, Taiwan
    bDepartment of Materials Science and Engineering, National Cheng Kung University, Tainan, 701 Taiwan

  • This article is an open access article distributed under the terms of the Creative Commons Attribution Non-Commercial License (http://creativecommons.org/licenses/by-nc/4.0) which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.

Abstract

Titanium dioxide thin films with silver dopant (Ag-TiO2) were successfully prepared on glass substrates using the thermal oxidation method. Ag-doped titanium films were prepared using direct current (DC) and radio frequency (RF) magnetron co-sputtering systems. The thermal oxidation temperature and Ag content effects on the phase evolution, microstructure, and photo catalytic activity of TiO2 film were studied. The crystalline structures and photo catalytic activity of the annealed Ag-doped TiO2 films were methodically investigated using transmission electron microscopy (TEM), field emission scanning electron microscopy (FESEM), X-ray diffraction (XRD), and ultraviolet spectrophotometry. The results exhibited that the thermal oxidation process at 550 oC clearly caused rutile phase formation in the 2.7% Ag-doped TiO2 films directly affecting the photo catalytic activity. The Ag-doped TiO2 films showed good photo catalytic activity under UV-light radiation, with 59% methylene blue dye degradation rate


Keywords: Ag-doped TiO2 film, Thermal oxidation, UV induced photo catalysis, Co-sputtering

This Article

  • 2021; 22(2): 179-185

    Published on Apr 30, 2021

  • 10.36410/jcpr.2021.22.2.179
  • Received on Aug 26, 2020
  • Revised on Nov 4, 2020
  • Accepted on Nov 11, 2020

Correspondence to

  • Ying-Chieh Lee

  • Department of Materials Engineering, National Pingtung University of Science & Technology, Pingtung 91201, Taiwan
    Tel : +886 7 7703202 ext. 7556 Fax: +886 7 7740552

  • E-mail: YCLee@mail.npust.edu.tw