Articles
  • The structural and electrical properties of fluorinedoped tin dioxide ceramics Prepared by spark plasma sintering (SPS)
  • S. Maleka, S. Baghshahia,*, R. Sarraf-Mamooryb and Ali Nematic
  • a Department of Materials Engineering, Science and Research Branch, Islamic Azad University, Tehran, Iran b Department of Materials Engineering, Tarbiat Modares University, Tehran, Iran c Department of Materials Science and Engineering, Sharif University of Technology, Tehran, Iran
Abstract
In this work, fluorine-doped tin dioxide ceramics were prepared by spark plasma sintering. In order to obtain a thin layer of fluorine-doped tin dioxide with high electrical conductivity and high optical transparency in the sputtering method, it is necessary to prepare a high density and high electrical conductivity target. To do so, tin dioxide powder and tin (II) fluoride powder were utilized to prepare the target. The concentration of fluorine was selected based on the mass ratio of tin (II) fluoride to tin dioxide and ranged between 0.04 and 0.24 (with 0.04 increments). After the powders were mixed, the target was made using spark plasma sintering. The best target had a mass ratio of tin (II) fluoride to tin dioxide of 0.16, with a relative density of 97% and an electrical resistance of 3 × 10−4 Ω.cm. This provided a suitable candidate for a target when using the sputtering method.

Keywords: Fluorine-doped tin dioxide, Spark plasma sintering, Sputtering, Electrical resistance, Transparency.

This Article

  • 2017; 18(12): 865-870

    Published on Dec 31, 2017

Correspondence to

  • E-mail: